static-nodes: tmpfiles - also create parents directories of device nodes

Before:

c /dev/cpu/microcode 0600 - - - 10:184
c /dev/fuse 0600 - - - 10:229
c /dev/btrfs-control 0600 - - - 10:234
c /dev/loop-control 0600 - - - 10:237
c /dev/snd/timer 0600 - - - 116:33

After:

d /dev/cpu 0755 - - -
c /dev/cpu/microcode 0600 - - - 10:184
c /dev/fuse 0600 - - - 10:229
c /dev/btrfs-control 0600 - - - 10:234
c /dev/loop-control 0600 - - - 10:237
d /dev/snd 0755 - - -
c /dev/snd/timer 0600 - - - 116:33
1 file changed